A universal species ion implantation model for implants into topographically complex structures with multiple materials

Description

Thesis (Ph. D.)--University of Texas at Austin, 2001. / Vita. Includes bibliographical references. Available also from UMI/Dissertation Abstracts International.

Links & Downloads

1. http://www.lib.utexas.edu/etd/r/d/2001/c42095/chenyang016.pdf#page=4
2. http://wwwlib.umi.com/cr/utexas/fullcit?p3025007

Tags

Ion implantation Silicon crystals.

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/50094445
Date	January 2001
Creators	Chen, Yang.
Source Sets	OCLC
Language	English
Detected Language	English
Source	Access restricted to users with UT Austin EID Full text (PDF) from UMI/Dissertation Abstracts International