On the mechanisms of hydrogen implantation induced silicon surface layer cleavage

Description

University, Diss., 2001--Marburg.

Links & Downloads

1. http://archiv.ub.uni-marburg.de/diss/z2002/0403/
2. http://deposit.d-nb.de/cgi-bin/dokserv?idn=972797750

Tags

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/175152705
Creators	Höchbauer, Tobias.
Source Sets	OCLC
Language	English
Detected Language	English
Type	Online-Publikation.