This graduation theses in introduction deals with principle and problems of electron signal detection in scanning electron microscopy and charging of insulating specimens in SEM. The experimental part of the thesis describe the methods of qualification and quantification of insulating specimen charging effect observed in environmental scanning electron microscope through the use of ionisation and scintillation detector in dependence on water vapour pressure in specimen chamber. The goal of the thesis is formation of the methodics useful to evaluate charging effect at insulating specimens observing and on the basis of measuring, determine optimal conditions for insulating specimen observation with ionisation and scintillation detector.
| Identifer | oai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:217628 |
| Date | January 2008 |
| Creators | Matějka, Milan |
| Contributors | Špinka, Jiří, Jirák, Josef |
| Publisher | Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií |
| Source Sets | Czech ETDs |
| Language | Czech |
| Detected Language | English |
| Type | info:eu-repo/semantics/masterThesis |
| Rights | info:eu-repo/semantics/restrictedAccess |
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