The thesis deals with electron beam micromachining of nonmetallic materials like glass, ceramics and plastics. A brief description of the device on which the experiments were carried out is included; the author has participated on its development. Main topic is experimental study of influence of main electron beam parameters on results of machining. Examined parameters include accelerating voltage, beam current, focusing and speed of machining. Influence of beam deflection is analyzed. Method of sequential machining by repeated passes of the electron beam is presented. Main examined materials are quartz glass, alumina and selected plastics. The usefulness of the technology is shown by several practical applications.
| Identifer | oai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:234155 |
| Date | January 2013 |
| Creators | Dupák, Libor |
| Contributors | Mrňa, Libor, Bábor, Petr, Lencová, Bohumila |
| Publisher | Vysoké učení technické v Brně. Fakulta strojního inženýrství |
| Source Sets | Czech ETDs |
| Language | Czech |
| Detected Language | English |
| Type | info:eu-repo/semantics/doctoralThesis |
| Rights | info:eu-repo/semantics/restrictedAccess |
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