This master's thesis deals with deposition of cobalt nanostructures using Electron Beam Induced Depositon (EBID). The thesis firstly describes theoretical background regarding EBID. In the following experimental part, the deposition process is optimized via analysis of exposition parameters and their influence on the final shape of nanostructures. These are analyzed via Atomic Force Microscopy (AFM). Optimized exposure parameters are then applied to the deposition of functional 3-dimensional nanostrucutres. In particular, the deposition of cobalt spheres. The elemental composition is analyzed by the means of element composition using Energy-dispersive X-ray Spectroscopy (EDX) and the nanostructures of desired morphologies are studied with Magnetic Force Microscopy (MFM) and Magneto-Optical Kerr Microscope).
| Identifer | oai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:254224 |
| Date | January 2016 |
| Creators | Vyroubal, Ondřej |
| Contributors | Kolíbalová, Eva, Kolíbal, Miroslav |
| Publisher | Vysoké učení technické v Brně. Fakulta strojního inženýrství |
| Source Sets | Czech ETDs |
| Language | Czech |
| Detected Language | English |
| Type | info:eu-repo/semantics/masterThesis |
| Rights | info:eu-repo/semantics/restrictedAccess |
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