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Diagnostik an einer gepulsten RF-Entladung zur Erzeugung dünner a:C-H Schichten

Bochum, Universiẗat, Diss., 2002.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/76442832
Date January 2002
CreatorsRudakowski, Siegmar.
Publisher[S.l. : s.n.],
Source SetsOCLC
LanguageGerman
Detected LanguageGerman

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