by Au Wing Shing. / Parallel title in Chinese characters. / Thesis (M.Phil.)--Chinese University of Hong Kong, 1992. / Includes bibliographical references (leaves 56-58). / Acknowledgements --- p.i / Abstract --- p.ii / Table of Content --- p.iii / Chapter CHATPER 1 : --- INTRODUCTION --- p.1 / Chapter CHAPTER 2 : --- EXPERIMENTAL SET-UP / Chapter A. --- General Description --- p.4 / Chapter B. --- Vacuum System and Chamber --- p.6 / Chapter C. --- Target Rotation and Motor Connection --- p.7 / Chapter D. --- Substrate Heating and Temperature Control --- p.8 / Chapter E. --- Pressure and Flow Control --- p.9 / Chapter CHAPTER 3 : --- THICKNESS AND COMPOSITION DISTRIBUTIONS OF FILMS DEPOSITED AT ROOM TEMPERATURE / Chapter A. --- Experimental Details --- p.10 / Chapter B. --- Shape of the Plume --- p.12 / Chapter C. --- Effect of Laser Fluence --- p.15 / Chapter D. --- Investigation of the Pb Deficiency in the Deposited Film --- p.24 / Chapter E. --- Effect of Oxygen Pressure --- p.27 / Chapter CHAPTER 4 : --- TARGET MODIFICATION AND DEPOSITION RATE / Chapter A. --- Introduction --- p.34 / Chapter B. --- Experimental Details --- p.40 / Chapter C.i. --- Result 1 : Normal Incidence Case --- p.41 / Chapter ii. --- Result 2 : 45° Incidence Case --- p.42 / Chapter D. --- Discussion --- p.43 / Chapter CHAPTER 5 : --- HIGH TEMPERATURE GROWTH ON DIFFERRENT KINDS OF SUBSTRATES / Chapter A. --- Introduction --- p.45 / Chapter B. --- Experimental Details --- p.47 / Chapter C. --- High Temperature Growth / Chapter i. --- Films grown on MgO (100) --- p.49 / Chapter ii. --- Films grown on Spinel --- p.50 / Chapter iii. --- Films grown on c-plane Sapphire --- p.51 / Chapter D. --- Discussion --- p.52 / Chapter CHAPTER 6 : --- OVERALL CONCLUSION AND FURTHER WORKS --- p.54 / References --- p.56 / Appendix1 --- p.59 / Appendix2 --- p.61
Identifer | oai:union.ndltd.org:cuhk.edu.hk/oai:cuhk-dr:cuhk_318925 |
Date | January 1992 |
Contributors | Au, Wing Shing., Chinese University of Hong Kong Graduate School. Division of Physics. |
Publisher | Chinese University of Hong Kong |
Source Sets | The Chinese University of Hong Kong |
Language | English |
Detected Language | English |
Type | Text, bibliography |
Format | print, iv, 61 leaves, [79] leaves of plates : ill. ; 30 cm. |
Rights | Use of this resource is governed by the terms and conditions of the Creative Commons “Attribution-NonCommercial-NoDerivatives 4.0 International” License (http://creativecommons.org/licenses/by-nc-nd/4.0/) |
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