Chemical vapor deposition is an important thin film process for the fabrication of TFT-LCD(Thin-Film-Transistor Liquid Crystal Display), the heat transfer coefficient on the substrate is the important influence parameter in the manufacturing process. For this reason, the main object of this thesis is to set up a temperature measurement system of transient thermochromatic liquid crystals. Furthermore, an experimental is carried out in the present study to investigate the characteristics of heat transfer resulting from a low speed air jet impinging onto a rectangular substrate confined in a vertical rectangular chamber. Finally, empirical equations are proposed to correlate the effect of Reynolds number¡BSeparation distances and Ratio of outlet.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0717106-130207 |
| Date | 17 July 2006 |
| Creators | Su, Chun-shuo |
| Contributors | Jen-jyh Hwang, Chien-Yuh Yang, Pey-Shey Wu, Ru Yang |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0717106-130207 |
| Rights | off_campus_withheld, Copyright information available at source archive |
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