Thin film lithium microbatteries were investigated in this project in which LiCoO₂ cathodes about 200 to 500 nm were fabricated by pulsed-laser deposition (PLD) at different processing parameters such as laser energy and fluence, substrate temperature, background gas pressure, and target-substrate distance. Structure, microstructure and composition of as-deposited LiCoO₂ films were determined by XRD, SEM and XPS. Optimal deposition parameters were identified. Relaxation of open-circuit voltage of as-prepared cells and charge-discharge cycling were conducted to characterize the electrochemical properties of microbatteries made of these LiCoO₂ films. / Singapore-MIT Alliance (SMA)
| Identifer | oai:union.ndltd.org:MIT/oai:dspace.mit.edu:1721.1/3831 |
| Date | 01 1900 |
| Creators | Shi, Z., Lü, L., Ceder, Gerbrand |
| Source Sets | M.I.T. Theses and Dissertation |
| Language | en_US |
| Detected Language | English |
| Type | Article |
| Format | 12642 bytes, application/pdf |
| Relation | Advanced Materials for Micro- and Nano-Systems (AMMNS); |
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