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Nanolithography and its application to the fabrication of electron devices

No description available.

1. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.308358

Identifer	oai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:308358
Date	January 1993
Creators	Hoole, Andrew Charles Frederick
Publisher	University of Cambridge
Source Sets	Ethos UK
Detected Language	English
Type	Electronic Thesis or Dissertation