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Aplikace grafénové membrány v nanoelektronických zařízeních / Application of Graphene Membrane in Nanoelectronic Devices

This diploma thesis is focused on the applications and fabrication of graphene membrane from graphene prepared by the chemical vapor deposition. Theoretical part deals with transport properties of the graphene and multiple scattering processes limiting the charge carrier mobility in this material. Included is short review of graphene membrane applications. Experimental part provides fabrication process for achieving suspended graphene device by utilizing electron beam lithography, focused ion beam, chemical etching and patterning of graphene. Graphene membrane is characterized by transport properties measurement and compared to non-suspended graphene.

Identiferoai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:231954
Date January 2015
CreatorsKormoš, Lukáš
ContributorsDrbohlavová, Jana, Bartošík, Miroslav
PublisherVysoké učení technické v Brně. Fakulta strojního inženýrství
Source SetsCzech ETDs
LanguageCzech
Detected LanguageEnglish
Typeinfo:eu-repo/semantics/masterThesis
Rightsinfo:eu-repo/semantics/restrictedAccess

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