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Air-gap based vertical cavity micro-opto-electro-mechanical Fabry-Pérot filters

University, Diss., 2005--Kassel.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/180004518
CreatorsIrmer, Sören.
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
TypeOnline-Publikation.

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