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Aluminium oxynitride thin films by reactive magnetron sputtering and their applications

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Identiferoai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:311793
Date January 2000
CreatorsGou, Zhenhui
PublisherUniversity of the West of Scotland
Source SetsEthos UK
Detected LanguageEnglish
TypeElectronic Thesis or Dissertation

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