A novel electrostatically driven silicon Micro Scanning Mirror for one and two dimensional deflection of light is presented. A special configuration of the driving electrodes allows the use of small electrode gaps without restricting the deflection of the plate geometrically. Two dimensional deflection is obtained by a gimbal mounting of the mirror plate. The modelling of the actuator is done by analytical and numerical calculations. For the fabrication of the actuators a CMOS compatible process has been developed. The mechanical elements are patterned in a 30 um thick layer of single crystal silicon. Using the ASE process 4 - 5 um wide trenches are etched into this layer with almost perpendicular sidewalls. In the case of the 2D-Scanner filled isolation trenches are used which allow to excite the two oscillations independently. 36 1D-variants have been designed and characterized. The scanning frequencies cover the range from 0.14 kHz up to 32 kHz. The mirror plates are quadratic with a side length between 0.5 mm and 3.0 mm. Synchronizing the driving voltage with the mechanical oscillation it is possible to achieve a stable oscillation. For large deflection angles a linear dependence of the deflection angle on the driving voltage has been observed. A mechanical deflection angle of up to +/-15° is achieved at a driving voltage of 20 V only, proving the high effectiveness of the driving principle. The performance of the 2D-scanner is demonstrated by three variants. Various Lissajous patterns with a frequency ratio between 1:1 and 13:1 have been generated. Investigations regarding the mechanical performance of the actuators have been carried out. The actuators have a shock resistance of more than 1000 g. Long run tests at a deflection angle of +/-15° mechanical with a duration of more than 10^9 have been performed. The characteristics of the devices did not change. Because of its performance the novel actuator is suitable to replace conventional scanners in a large variety of applications.
| Identifer | oai:union.ndltd.org:DUETT/oai:DUETT:duett-06012001-091735 |
| Date | 01 June 2001 |
| Creators | Schenk, Harald |
| Contributors | Prof. Dr. Günter Zimmer |
| Publisher | Gerhard-Mercator-Universitaet Duisburg |
| Source Sets | Dissertations and other Documents of the Gerhard-Mercator-University Duisburg |
| Language | German |
| Detected Language | English |
| Type | text |
| Format | text/html, application/pdf |
| Source | http://www.ub.uni-duisburg.de/ETD-db/theses/available/duett-06012001-091735/ |
| Rights | unrestricted, I hereby certify that, if appropriate, I have obtained and attached hereto a written permission statement from the owner(s) of each third party copyrighted matter to be included in my thesis, dissertation, or project report, allowing distribution as specified below. I certify that the version I submitted is the same as that approved by my advisory committee. Hiermit erteile ich der Universitaet Duisburg das nicht-ausschliessliche Recht unter den unten angegebenen Bedingungen, meine Dissertation, Staatsexamens- oder Diplomarbeit, meinen Forschungs- oder Projektbericht zu veroeffentlichen und zu archivieren. Ich behalte das Urheberrecht und das Recht das Dokument zu veroeffentlichen und in anderen Arbeiten weiterzuverwenden. |
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