The aim of this work is to design fully working measuring system for the reactive ion etching system (RIE). The Michelson interfometer, previously developed in Ústav přístrojové techniky, v.v.i., is used in this work. The theoretical part is aimed at description of interferometric methods for precise measuring of length. In next part the etching proces with RIE is described. In practical part the testing system was constructed from the parts of Thorlabs company . The functionality was controlled with this system and the results of measuring were compared with the profilometer. In next step technical drawings were created and the whole system was made.
| Identifer | oai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:254215 |
| Date | January 2016 |
| Creators | Maňka, Tadeáš |
| Contributors | Antoš, Martin, Šerý, Mojmír |
| Publisher | Vysoké učení technické v Brně. Fakulta strojního inženýrství |
| Source Sets | Czech ETDs |
| Language | Czech |
| Detected Language | English |
| Type | info:eu-repo/semantics/masterThesis |
| Rights | info:eu-repo/semantics/restrictedAccess |
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