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Simulation and optimization of MEMS actuators and tunable capacitors

No description available.
Identiferoai:union.ndltd.org:mcgill.ca/oai:escholarship.mcgill.ca:f7623c955
Date January 2006
CreatorsWan, Weijie, 1982-
PublisherMcGill University
Source SetsMcGill University
Languagehttp://id.loc.gov/vocabulary/iso639-2/eng
Detected LanguageEnglish
TypeThesis
Rights© Weijie Wan, 2006, All items in eScholarship@McGill are protected by copyright with all rights reserved unless otherwise indicated.
RelationProquest: AAIMR32626, Pid: 99798

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