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Design and characterization of silicon micromechanical resonators

Thesis (Ph.D)--Electrical and Computer Engineering, Georgia Institute of Technology, 2009. / Committee Member: David R. Hertling; Committee Member: Farrokh Ayazi; Committee Member: Gary S. May; Committee Member: Oliver Brand; Committee Member: Paul A. Kohl. Part of the SMARTech Electronic Thesis and Dissertation Collection.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/522282187
Date January 2008
CreatorsHo, Gavin Kar-Fai.
PublisherAtlanta, Ga. : Georgia Institute of Technology,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceAvailable online, Georgia Institute of Technology:

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