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Surface cleaning and thin film etching using high pressure and supercritical fluids /

Thesis (Ph. D.)--Lehigh University, 1997. / Includes vita. Includes bibliographical references.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/36789212
Date January 1996
CreatorsBakker, Geoffrey L.,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
TypeAcademic dissertations

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