Bulk-micromachined mass airflow sensor fabrication and testing methodology for an undergraduate microfabrication course

Description

Thesis (M. Eng.)--University of Louisville, 2000. / Typescript (Xerox copy). Department of Electrical Computer Engineering. Vita. Includes bibliographical references (leaves 432-441).

Links & Downloads

1. http://etd.louisville.edu/data/UofL0014t2000.pdf

Tags

Microfabrication.

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/61355651
Date	January 2000
Creators	Cole, Jason B.,
Source Sets	OCLC
Language	English
Detected Language	English