Step and flash imprint lithography a low-pressure, room-temperature nanoimprint lithography /

Description

Thesis (Ph. D.)--University of Texas at Austin, 2001. / Vita. Includes bibliographical references. Available also from UMI/Dissertation Abstracts International.

Links & Downloads

1. http://www.lib.utexas.edu/etd/r/d/2001/c672/colburnme016.pdf#page=2
2. http://wwwlib.umi.com/cr/utexas/fullcit?p3025205

Tags

Semiconductors. Microlithography.

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/50094455
Date	January 2001
Creators	Colburn, Matthew Earl,
Source Sets	OCLC
Language	English
Detected Language	English
Source	Access restricted to users with UT Austin EID Full text (PDF) from UMI/Dissertation Abstracts International