Fluid and solid mechanics in the step and flash imprint lithography process

Description

Thesis (Ph. D.)--University of Texas at Austin, 2006. / Vita. Includes bibliographical references.

Links & Downloads

1. http://repositories.lib.utexas.edu/bitstream/handle/2152/2624/reddys45839.pdf

Tags

Microlithography. Semiconductors.

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/85767038
Date	January 1900
Creators	Reddy, Shravanthi,
Publisher	[Austin, Tex. : University of Texas Libraries,
Source Sets	OCLC
Language	English
Detected Language	English