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Bimetallic thermal resists for photomask, micromachining and microfabrication /

Thesis (Ph.D.) - Simon Fraser University, 2004. / Theses (School of Engineering Science) / Simon Fraser University.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/243541037
Date January 1900
CreatorsTu, Richard Yuqiang.
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish

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