| Identifer | oai:union.ndltd.org:DRESDEN/oai:qucosa:de:qucosa:93635 |
| Date | 09 September 2024 |
| Publisher | Fraunhofer-Institut für Photonische Mikrosysteme IPMS |
| Source Sets | Hochschulschriftenserver (HSSS) der SLUB Dresden |
| Language | German |
| Detected Language | German |
| Type | info:eu-repo/semantics/publishedVersion, doc-type:PeriodicalPart, info:eu-repo/semantics/PeriodicalPart, doc-type:Text |
| Rights | info:eu-repo/semantics/openAccess |
| Relation | urn:nbn:de:bsz:14-qucosa2-933066, 3173002-4, qucosa:93306 |
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