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Study of silicon-on-insulator structures formed by low dose implantation of oxygen and nitrogen

No description available.
Identiferoai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:281765
Date January 1995
CreatorsWong, Jimmy Kam Yiu
PublisherImperial College London
Source SetsEthos UK
Detected LanguageEnglish
TypeElectronic Thesis or Dissertation

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