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Development of a novel optical contact probing system for nano-CMM

This thesis describes the development and the verification of a novel micro probe system for high accurancy downscaled Coordinate Measuring Machines (CMMs).

Identiferoai:union.ndltd.org:ADTP/284002
Date January 2008
CreatorsJi, Hong
Source SetsAustraliasian Digital Theses Program
LanguageEN-AUS
Detected LanguageEnglish
RightsCopyright Ji Hong 2008

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