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Development of a magnetic suspension system and its applications in nano-imprinting and nano-metrology

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Identiferoai:union.ndltd.org:OhioLink/oai:etd.ohiolink.edu:osu1054236218
Date06 August 2003
CreatorsKuo, Shih-Kang
PublisherThe Ohio State University / OhioLINK
Source SetsOhiolink ETDs
LanguageEnglish
Detected LanguageEnglish
Typetext
Sourcehttp://rave.ohiolink.edu/etdc/view?acc_num=osu1054236218
Rightsunrestricted, This thesis or dissertation is protected by copyright: all rights reserved. It may not be copied or redistributed beyond the terms of applicable copyright laws.

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