The design methodology and realization of nanocomposite films aiming for mechanical (superhardness, toughness) and functional (optical, microelectronic) properties were discussed in this paper. Superhard TiCrCN and nc-TiN/a-SiNx films and super-tough nc-TiC/a-C(Al) films were prepared through co-sputtering method by optimal design of microstructure. The nanocrystalline silicon (nc-Si) passivated with a matrix of thermally grown silicon dioxide were prepared using implantation of Si into SiO₂ film, and showed improved photoluminescence and optical properties. Also discussed is the nano-composite design of thin film resistor with optimized temperature coefficient of resistivity. / Singapore-MIT Alliance (SMA)
| Identifer | oai:union.ndltd.org:MIT/oai:dspace.mit.edu:1721.1/3836 |
| Date | 01 1900 |
| Creators | Zhang, Sam, Fu, Yongqing, Du, Hejun, Liu, Yang, Chen, Tupei |
| Source Sets | M.I.T. Theses and Dissertation |
| Language | en_US |
| Detected Language | English |
| Type | Article |
| Format | 379704 bytes, application/pdf |
| Relation | Advanced Materials for Micro- and Nano-Systems (AMMNS); |
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