Entwicklung eines hochpräzisen Justagesystems für die UV-Nanoimprint-Lithographie /

Description

Zugl.: Aachen, Techn. Hochsch., Diss., 2006.

Links & Downloads

1. http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&doc_number=016032652&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA

Tags

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/180958350
Date	January 2006
Creators	Fuchs, Andreas.
Publisher	Aachen : Shaker,
Source Sets	OCLC
Language	Undetermined
Detected Language	German