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Laser-based etching technique for micro, nano patterning of transparent materials laser-induced backside wet etching (LIBWE)

Zugl.: Halle (Saale), Univ., Diss., 2007 u.d.T.: Laser induced backside wet etching of glasses and crystals / Hergestellt on demand

  1. http://d-nb.info/991166329/04
Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/423854933
Date January 1900
CreatorsBöhme, Rico
PublisherSaarbrücken VDM Verlag Dr. Müller
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish

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