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Contact Detection for Nanomanipulation in Scanning Electron Microscope

A major difficulty in the fabrication of nanostructure based electronics is the lack of effective processes capable of precisely arranging nanostructures into predefined positions. Top-down approaches introduce increased complexity and a high cost for practical industrial use, while bottom-up approaches are probabilistic in nature and do not provide precise control of nanostructure properties (i.e., number, diameter), which influence device performance. Alternatively, nanomanipulation promises specificity, precision and programmed motion and its automation may facilitate the large-scale fabrication of nanostructure based devices.
This study focuses on the development of an automated contact detection algorithm which positions an end-effector in contact with a target surface without the need for additional equipment, devices or sensors. We demonstrate this algorithm as an enabling feature for automated nano-FET biosensor construction with precise control over nanowire parameters thereby reducing device-to-device variability and also potentially allowing us to optimize individual device performance.

Identiferoai:union.ndltd.org:LACETR/oai:collectionscanada.gc.ca:OTU.1807/31619
Date03 January 2012
CreatorsTo, Steve
ContributorsSun, Yu
Source SetsLibrary and Archives Canada ETDs Repository / Centre d'archives des thèses électroniques de Bibliothèque et Archives Canada
Languageen_ca
Detected LanguageEnglish
TypeThesis

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