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Low temperature silicon epitaxy defects and electronic properties /
Description
University, Diss., 2003--Stuttgart.
Links & Downloads
http://elib.uni-stuttgart.de/opus/volltexte/2003/1483/index.html
http://deposit.d-nb.de/cgi-bin/dokserv?idn=968689035
http://elib.uni-stuttgart.de/opus/volltexte/2003/1483/pdf/diss_final.pdf
Tags
Additional Fields
Identifer
oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/175162087
Creators
Wagner, Thomas.
Source Sets
OCLC
Language
English
Detected Language
English
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