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Microelectromechanical system (MEMS) simulaton /

Thesis (M. App. Sc.)--Carleton University, 2001. / Includes bibliographical references (p. 137-[143]). Also available in electronic format on the Internet.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/290512368
Date January 1900
CreatorsO'Regan, Christina
PublisherOttawa,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceProQuest Full Text

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