With the advent of electronics technology, various instruments in surface roughness measurements appear sequentially. Errors and erroneous judgment will happen while using unsuitably, due to the operating method and range are not exactly the same. For stylus profilometer, the effects of operating parameters on surface roughness of standard sample and machined elements are presented. Furthermore, small size elements or mirror-like surfaces are measured by scanning electron microscope (SEM) and atomic force microscope (AFM).
Experimental results show that the cut-off value is the most significant parameter to Ra, it suggests that the best range for the cut-off value is greater and equal to 0.8mm. The error of Rmax is less than 3% at scanning speed of 0.05, 0.1 and 0.5mm/s, and that within 10% at scanning speed of 2mm/s. Rmax increases with increasing angle of work-stage. The measurement length for standard sample is insignificant to Ra and Rmax.
When the surface with curvature is measured, the curvature is removed by the cut-off value for filtering, and the roughness curve is judged whether include peaks and valleys of profile curve, and then the surface roughness is measured by man-made. When the irregular surface is measured, the cut-off value of 0.8mm and higher is selected, and represented surface in the way of separate section or area. SEM and AFM are used to assist in measuring for real roughness value when small size elements or mirror-like surfaces are measured. Variations of roughness of machined elements in polishing are measured finally, results show that Ra, Rq, Rmax, Rz, Skewness will decrease with increasing polishing time, and Kurtosis will increase.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0802104-174329 |
| Date | 02 August 2004 |
| Creators | Li, Huei-an |
| Contributors | Rong-Tsong Lee, Y.R. Jeng, Yuang-Cherng Chiou, J. N. Aoh |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0802104-174329 |
| Rights | restricted, Copyright information available at source archive |
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