Polymer based optical waveguides on silicon substrate were fabricated and the characteristics of the polyimide used were investigated.
The optical waveguides were designed according to the simulation results calculated by beam propagation method. The fabrication began with spinning and curing two polyimide materials as the cladding and the core layers on silicon substrate. The refractive index of polyimide was obtained by prism coupling system. The index contrast was 0.67 % and the waveguide was the ridge type structure obtained by reactive ion etching process. Then a top cladding was spun on the sample and cured to complete the waveguide fabrication.
Finally, the propagation loss of the TE mode of the waveguides was measured by using cut-back method. The loss was 2.4 dB/cm.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0701103-181959 |
| Date | 01 July 2003 |
| Creators | Lin, Shu-Hung |
| Contributors | Ju-Ta Tung, Ann-Kao Chu, Yi-Jen Chiu, Wen-Chang Ho |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0701103-181959 |
| Rights | unrestricted, Copyright information available at source archive |
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