As Moore's law continues to 20nm and below, traditional CMOS
device faces severe short channel effects. Industry is switching
from traditional CMOS to FinFET in order to keep Moore's law alive.
Due to the three-dimensional structure of FinFET, many challenges need to be solved. After that, FinFET will finally be able to replace traditional CMOS in the semiconductor industry.
This thesis discusses the manufacturing challenges of FinFET. In addressing these challenges, characterization of the FinFET standard cells has been done. The characterization is based on saturation current, leakage current, implantation angle and the average edge placement error at metal one layer. Three design variables,
including the metal pitch, the fin pitch and the fin width are
optimized to achieve better design quality. Standard cell library
which contains combinatorial cells as well as sequential cells are
characterized and optimized. Two optimization scenarios are included
in the final results. One is performance driven, optimizing the
saturation current and the leakage current, while the other is
manufacturability driven, optimizing the implantation angle and the average EPE. The optimization results show the tradeoff between performance and manufacturability. / text
| Identifer | oai:union.ndltd.org:UTEXAS/oai:repositories.lib.utexas.edu:2152/ETD-UT-2012-05-5391 |
| Date | 09 July 2012 |
| Creators | Zhang, Boyang, 1988- |
| Source Sets | University of Texas |
| Language | English |
| Detected Language | English |
| Type | thesis |
| Format | application/pdf |
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