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A silicon micromachined lateral resonant strain gauge pressure sensor

No description available.
Identiferoai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:389458
Date January 1996
CreatorsWelham, Christopher J.
PublisherUniversity of Warwick
Source SetsEthos UK
Detected LanguageEnglish
TypeElectronic Thesis or Dissertation

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