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Organic inhibitors for metal corrosion in resist cleaners

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1. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.366779

Identifer	oai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:366779
Date	January 2001
Creators	Daviot, Jerome
Publisher	University of Strathclyde
Source Sets	Ethos UK
Detected Language	English
Type	Electronic Thesis or Dissertation