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Dry etching processes for ferroelectric capacitors

Ph.D.

Identiferoai:union.ndltd.org:VTETD/oai:vtechworks.lib.vt.edu:10919/114434
Date January 1995
CreatorsPan, Wei
ContributorsMaterials Engineering Science
PublisherVirginia Polytechnic Institute and State University
Source SetsVirginia Tech Theses and Dissertation
LanguageEnglish
Detected LanguageEnglish
TypeDissertation, Text
Formatxv, 167 leaves, application/pdf, application/pdf
RightsIn Copyright, http://rightsstatements.org/vocab/InC/1.0/
RelationOCLC# 34347974

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