This dissertation proposes a novel packaging methodology for micro-electro-mechanical systems (MEMS) based pressure sensors by using a patterned ultra-thick (150
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0708109-171206 |
| Date | 08 July 2009 |
| Creators | Chen, Lung-tai |
| Contributors | Chin-Ting Lee, Shiuh Chao, Gong-Ru Lin, Hao-Chung Kuo, Wen-Yao Huang, Wood-Hi Cheng, An-Kuo Chu, Meng-Chyi Wu, Chia-Yen Lee |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | English |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0708109-171206 |
| Rights | restricted, Copyright information available at source archive |
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