In this thesis, we successfully fabricated patterned semiconductor substrates, edge-emitting lasers with deeply etched distributed Bragg reflectors (DBRs), two-dimensional photonic crystals (2DPCs) and two-dimensional photonic crystal microcavities (2DPC microcavities) by electron-beam lithography and inductively coupled plasma-reactive ion etching (ICP-RIE). We have obtained a minimum writing linewidth of 50nm and a maximum writing range of 500¡Ñ500µm2 in our electron-beam lithography system. Pitch arrays of 100nm pitch-diameter and 100nm separation have been formed on 100¡Ñ100µm2 semiconductor substrates. The etching depth of patterned Si substrates and patterned GaAs substrates are 50nm and 20nm, respectively. In the design of edge-emitting lasers with deeply etched DBRs, two and three pairs of DBRs were formed on the edge of laser cavity, respectively. To obtain high reflectance at wavelength (£f) = 960nm, 209nm mirror width and 240nm or 720nm air gap were fabricated.
In the design of 2DPCs, a triangular array of air columns was adopted. The lattice constant (A) and column radius (R) are 742nm and 327nm, respectively. It has a band gap for TE modes corresponding to wavelength range in 936.45nm~968.85nm. We placed single defect in the 2DPCs to form 2DPC microcavities. In addition, we simulated the photonic band structure of a seven-defect 2DPC microcavity with A = 224nm and R = 56nm. We obtained a monopole defect mode at £f = 959.86nm.
To measure 2DPCs and 2DPC microcavities, we have set up a micro-photoluminescence (Micro-PL) spectrum measurement system. We observed the Micro-PL intensity of the 2DPC microcavity is 4.5 times larger than 2DPCs at £f = 960nm in the same pumping power. The 2DPC microcavities show a lasing performance under optical pumping. The threshold power of 2DPC microcavities is 5.13mW~6.81mW at room temperature and decreases to 1.4mW~3.13mW at 15¢J.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0708104-131310 |
| Date | 08 July 2004 |
| Creators | Shen, Yen-liang |
| Contributors | Lung-han Peng, Kuo-jui Lin, Ching-ting Lee, Tsong-sheng Lay, Tao-yuan Chang |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0708104-131310 |
| Rights | not_available, Copyright information available at source archive |
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