Three examples of bis(diaryliodonium) perfluorosulfonimide (BDI-PFSI) zwitterions have been prepared as a potential new class of ionic photo-acid generators for chemically amplified photoresist formulations.
Identifer | oai:union.ndltd.org:ETSU/oai:dc.etsu.edu:etsu-works-16969 |
Date | 01 April 2014 |
Creators | Mei, Hua, Desmarteau, Darryl D. |
Publisher | Digital Commons @ East Tennessee State University |
Source Sets | East Tennessee State University |
Detected Language | English |
Type | text |
Source | ETSU Faculty Works |
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