Design, synthesis and testing of materials for 157 nm photolithography

Description

Thesis (Ph. D.)--University of Texas at Austin, 2005. / Supervisor: C. Grant Willson. Vita. Includes bibliographical references.

Links & Downloads

1. http://repositories.lib.utexas.edu/bitstream/handle/2152/1522/chambersjrc51708.pdf

Tags

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/61205589
Date	January 2005
Creators	Chambers, Charles Ray, Willson, C. G.
Source Sets	OCLC
Language	English
Detected Language	English