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Spectroscopic studies of the etching of Si and SiOsub(2) substrates in CFsub(4)/Osub(2) discharges
No description available.
Links & Downloads
http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.354701
Tags
541
Physical chemistry
Additional Fields
Identifer
oai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:354701
Date
January 1984
Creators
Hydes, A. J.
Publisher
University of Bristol
Source Sets
Ethos UK
Detected Language
English
Type
Electronic Thesis or Dissertation
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