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Piezo-driven stages for nanopositioning with extreme stability theoretical aspects and practical design considerations /

Thesis (doctoral)--Technische Universiteit Delft, 1997. / Includes bibliographical references (p. [159]-163).

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/607003540
Date January 1900
CreatorsWulp, Hendrik van der.
PublisherDelft, Netherlands : Delft University Press,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish

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