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Layer transferred single-crystal silicon piezoresistive aero-acoustic microphone /

Thesis (M.Phil.)--Hong Kong University of Science and Technology, 2009. / Includes bibliographical references.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/434201844
Date January 2009
CreatorsZhou, Zhijian.
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceView abstract or full-text.

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