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Microfabrication of a MEMS piezoresistive flow sensor - materials and processes

Thesis (M. S.)--Chemical Engineering, Georgia Institute of Technology, 2009. / Committee Chair: Allen, Mark; Committee Member: Allen, Sue Ann Bidstrup; Committee Member: Wong, C.P.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/429079481
Date January 2008
CreatorsAiyar, Avishek R.
PublisherAtlanta, Ga. : Georgia Institute of Technology,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceAvailable online, Georgia Institute of Technology:

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