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Design and operation of a 12 cm diameter, 750 Watt microwave plasma source

Thesis--Wisconsin. / Includes bibliographical references (leaf 30).

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/609108921
Date January 1976
CreatorsSmith, Donald Keith,
PublisherMadison, Wis. : University of Wisconsin,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish

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