Influence of the plasma chemistry and energetics on the composition and structure evolution of sputtered oxide thin films

Description

Zugl.: Aachen, Techn. Hochsch., Diss., 2006

Links & Downloads

1. http://nbn-resolving.de/urn:nbn:de:hbz:82-opus-16632
2. http://deposit.d-nb.de/cgi-bin/dokserv?idn=982281218
3. http://darwin.bth.rwth-aachen.de/opus3/volltexte/2006/1663/
4. http://darwin.bth.rwth-aachen.de/opus3/volltexte/2006/1663/pdf/MrazS̲tanislav.pdf

Tags

Oxidschicht. Sputtern. Plasmachemie.

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/162428911
Date	January 2006
Creators	Mráz, Stanislav
Publisher	Aachen Shaker
Source Sets	OCLC
Language	English
Detected Language	English