Layout optimization with dummy features for chemical-mechanical polishing manufacturability

Description

Thesis (Ph. D.)--University of Texas at Austin, 2002. / Vita. Includes bibliographical references. Available also from UMI Company.

Links & Downloads

1. http://repositories.lib.utexas.edu/bitstream/handle/2152/994/tianr026.pdf
2. http://wwwlib.umi.com/cr/utexas/fullcit?p3108521

Tags

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/57070244
Date	January 2002
Creators	Tian, Ruiqi.
Source Sets	OCLC
Language	English
Detected Language	English