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Development of a process for fabricating high aspect ratio parylene microstructures

Thesis (M.Eng.)--University of Louisville, 2006. / Title and description from thesis home page (viewed Jan. 30, 2007). Department of Electrical and Computer Engineering. Vita. "May 2006." Includes bibliographical references (p. 58-61).

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/80982678
Date January 2006
CreatorsWaqar, Asma.
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish

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